{"id": "na-chips-smee-lithography", "key": "neuroai2026chipssmeelithography", "title": "China's SMEE delivered a 28nm lithography machine — how far can it close the gap?", "author": "NeuroAI", "publisher": "BrainNet (脑机网)", "date": "2026-10-09", "url": "https://neuroai.site/a/na-chips-smee-lithography", "section": "Chips & Compute", "apa": "NeuroAI. (2026, October 9). China's SMEE delivered a 28nm lithography machine — how far can it close the gap?. BrainNet (脑机网). https://neuroai.site/a/na-chips-smee-lithography", "mla": "\"China's SMEE delivered a 28nm lithography machine — how far can it close the gap?.\" NeuroAI, BrainNet (脑机网), 9 Oct. 2026, neuroai.site/a/na-chips-smee-lithography.", "chicago": "\"China's SMEE delivered a 28nm lithography machine — how far can it close the gap?.\" NeuroAI, BrainNet (脑机网), October 9, 2026. https://neuroai.site/a/na-chips-smee-lithography.", "plain": "NeuroAI (脑机网), \"China's SMEE delivered a 28nm lithography machine — how far can it close the gap?,\" 9 October 2026, https://neuroai.site/a/na-chips-smee-lithography", "bibtex": "@misc{neuroai2026chipssmeelithography,\n  author       = {{NeuroAI}},\n  title        = {{China's SMEE delivered a 28nm lithography machine — how far can it close the gap?}},\n  year         = {2026},\n  month        = {oct},\n  publisher    = {{BrainNet (脑机网)}},\n  howpublished = {\\url{https://neuroai.site/a/na-chips-smee-lithography}},\n  note         = {China AI Decoded. Accessed 2026-10-29.},\n  language     = {english}\n}\n", "ris": "TY  - GEN\nTI  - China's SMEE delivered a 28nm lithography machine — how far can it close the gap?\nAU  - NeuroAI\nPY  - 2026\nDA  - 2026/10/09\nPB  - BrainNet (脑机网)\nUR  - https://neuroai.site/a/na-chips-smee-lithography\nLA  - en\nER  - \n", "exports": {"bibtex": "https://neuroai.site/a/na-chips-smee-lithography.bib", "ris": "https://neuroai.site/a/na-chips-smee-lithography.ris", "markdown": "https://neuroai.site/a/na-chips-smee-lithography.md", "json": "/api/cite/na-chips-smee-lithography"}}